The modern electronics, optics, instrument-making industry demands to work with very high degree flatness and smoothness surfaces. Modern treatment technology lets to produce surfaces with mean-square roughness meaning is comparable to individual atom size. It’s optimal for controlling the surfaces with such roughness is using x-radiation with about 1 Angstroem wave-length.


8p06=А.Г.Турьянский, Л.В.Великов, А.В.Виноградов, И.В.Пиршин.

"Рентгеновский рефлектометр".

Патент РФ2129698,1998, МКИ G01B 15/00


9s17=A.V.Vinogradov, A.G.Touryanski, I.V.Pirshin, R.M.Feschenko.

"Two-Wave x-ray method for characterization of super-smooth substrates

and thin films".

SPIE's 44th Annual Meeting and Exhibition,18-23 July 1999, Delaver,

Colorado,USA, p.48.


2t53-47txtvar=A.G. Touriyanski, I.V. Pirshin, N.L. Popov, YuA. Uspenski, A.V. Vinogradov.

"Relative X-Ray Reflectometry for Characterization of Nanostructures".

Proceedings of the 5th ISTC Seminar Nanotechnologies in the Area of Physics, Chemestry and Biotechnology. S-Petersburg, Russia, May 27-29, 2002, pp 316-20.

аннотация, текст